▎ 摘 要
NOVELTY - This utility model claims an antenna integrated PIN junction graphene terahertz detector, belonging to the field of the semiconductor device. This utility model comprises a substrate, wherein the substrate is a planar antenna and graphene PIN junction, the plane antenna and the graphene PIN junction is provided with gap, and is provided with the first ohmic contact electrode and the second ohm contact electrode on the P region and the N region of the graphene PIN. And present the terahertz detector, detecting range of the detector is made of the utility model can cover the whole terahertz frequency range, and fast response speed, which is about a picosecond level, at the same time, the utility model detector in low cost, simple manufacturing process, and it greatly improves the performance of the wave terahertz detector, at the same time, the detector is further capable of being in the room temperature, overcomes the current detector to a defect of a work and improve the adaptability of the detector is integrated planar antenna, but also improves the detecting ability is weak terahertz signal.