• 专利标题:   Preparing graphene useful for electronic device and optical device, comprises adopting radio frequency plasma enhanced chemical vapor deposition method to prepare polycrystalline cobalt film, and carrying out deposition.
  • 专利号:   CN104709897-A
  • 发明人:   YU M
  • 专利权人:   QINGDAO SHENGLI BOILER CO LTD
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN104709897-A 17 Jun 2015 C01B-031/04 201566 Pages: 4 Chinese
  • 申请详细信息:   CN104709897-A CN10689684 17 Dec 2013
  • 优先权号:   CN10689684

▎ 摘  要

NOVELTY - Preparing graphene, comprises adopting radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method and using magnetron sputtering system to prepare polycrystalline cobalt film as a substrate, and under substrate temperature of less than 800 degrees C, total gas flow rate of less than 78sccm, and short deposition time of 40 seconds, preparing high-quality 1-5C graphene. USE - The grapheme is useful for electronic device and optical device. ADVANTAGE - The method is carried out under relatively low temperature, has short depositing time, requires less carbon source, and greatly reduces grapheme cost. The graphene has high surface area, high optical transmittance, high conductivity, and excellent physical property.