• 专利标题:   Semiconductor element has substrate, graphene provided on one surface of substrate, and convex portion whose at least one portion comprises metal.
  • 专利号:   JP2015198194-A, JP6281383-B2
  • 发明人:   KOJIMA E, KANO K
  • 专利权人:   DENSO CORP
  • 国际专利分类:   C01B031/02, H01L021/205, H01L029/786, H01L051/05, H01L051/30, H01L051/40, C01B032/05, C01B032/15, C01B032/186
  • 专利详细信息:   JP2015198194-A 09 Nov 2015 H01L-029/786 201579 Pages: 13 Japanese
  • 申请详细信息:   JP2015198194-A JP076200 02 Apr 2014
  • 优先权号:   JP076200

▎ 摘  要

NOVELTY - A semiconductor element (101) has a substrate (1), graphene (15) provided on one surface of the substrate, and a convex portion (5) which contacts the edge portion of the graphene. The convex portion equips the graphene side with the inclined side surface, and the edge portion of the graphene contacts the convex portion in the inclined side surface. At least one portion of the convex portion comprises metal, and the metal contacts with the graphene. USE - Semiconductor element (claimed). ADVANTAGE - The position of graphene can be pinpointed with high precision, in the semiconductor element. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view explaining the manufacture of semiconductor element. Substrate (1) Metal layer (3) Convex portion (5) Graphene (15) Semiconductor element (101)