• 专利标题:   Method for producing metal chalcogenide thin film on flexible substrate, involves supplying transition metal precursor and chalcogen-containing gas onto graphene formed on substrate, so as to form metal chalcogenide thin film.
  • 专利号:   WO2016122081-A1, KR2016093375-A
  • 发明人:   CHOI M, LEE C, KIM Y
  • 专利权人:   LG ELECTRONICS INC, UNIV SUNGKYUNKWAN RES BUSINESS FOUND, UNIV SUNGKYUNKWAN RES BUSINESS FOUND
  • 国际专利分类:   H01L031/0236, H01L031/0264
  • 专利详细信息:   WO2016122081-A1 04 Aug 2016 H01L-031/0236 201655 Pages: 25
  • 申请详细信息:   WO2016122081-A1 WOKR010285 30 Sep 2015
  • 优先权号:   KR014289

▎ 摘  要

NOVELTY - The method involves forming a diffusion prevention film i.e. graphene on a metal substrate in foil form (S10). A transition metal precursor and a chalcogen-containing gas are supplied (S20) onto the graphene, so as to form a metal chalcogenide thin film. The substrate is transferred (S30), where the thickness of the metal substrate is between 25 and 100 micrometer, and the metal substrate is made from one of Cu, Ni, Pt, Fe, Au, brass, and stainless steel. A metal oxide film is formed on the metal substrate by oxidation of the metal substrate. USE - Method for producing a metal chalcogenide thin film on a flexible substrate. ADVANTAGE - The transition metal precursor and the chalcogen-containing gas are supplied onto the graphene, so as to form the metal chalcogenide thin film, thus enabling to obtain a high-quality and uniform metal chalcogenide thin film on the substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart of a method for producing a metal chalcogenide thin film on a flexible substrate. '(Drawing includes non-English language text)' Start (AA) End (BB) Step for forming a diffusion prevention film i.e. graphene on a metal substrate in foil form (S10) Step for supplying transition metal precursor and chalcogen-containing gas onto the graphene, so as to form a metal chalcogenide thin film (S20) Step for transferring the substrate (S30)