• 专利标题:   Forming a graphene layer on a sapphire substrate involves forming single crystalline semiconductor-carbon alloy layer on sapphire substrate; and forming graphene layer directly on single crystalline semiconductor-carbon alloy layer.
  • 专利号:   US2012112164-A1, US8541769-B2
  • 发明人:   CHU J O, DIMITRAKOPOULOS C D, FREITAG M O, GRILL A, MCARDLE T J, WISNIEFF R L
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L021/04, H01L029/12
  • 专利详细信息:   US2012112164-A1 10 May 2012 H01L-029/12 201234 Pages: 44 English
  • 申请详细信息:   US2012112164-A1 US942490 09 Nov 2010
  • 优先权号:   US942490

▎ 摘  要

NOVELTY - Forming a graphene layer (130) on a sapphire substrate (410), involves: forming a single crystalline semiconductor-carbon alloy layer (320) on a sapphire substrate, where the single crystalline semiconductor-carbon alloy layer is epitaxially aligned to the sapphire substrate; and forming a graphene layer directly on the single crystalline semiconductor-carbon alloy layer. USE - For forming a graphene layer on a sapphire substrate (claimed). ADVANTAGE - The commercial availability of sapphire substrates and semiconductor substrates with a diameter of more than six inches allows formation of a graphene layer on a commercially scalable substrate for low cost manufacturing of devices employing a graphene layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a structure comprising a graphene layer located on a single crystalline sapphire substrate. DESCRIPTION OF DRAWING(S) - The figure shows a vertical cross-sectional view of a structure including underlying semiconductor substrate, silicon carbide substrate, and graphene layer deposited on them. Top surface (21) Graphene layer (130) Single crystalline semiconductor-carbon alloy layer (320) Sapphire substrate (410)