• 专利标题:   Masking article for laser induced graphene patterning, has polymer layer formed on substrate, and patterned metal mask layer made of aluminum, copper, silver, and gold material that is formed on polymer layer.
  • 专利号:   CN206758405-U
  • 发明人:   ZHANG M, LIANG J, LIU Y, WU Y, WANG X
  • 专利权人:   UNIV TSINGHUA SHENZHEN GRADUATE SCHOOL
  • 国际专利分类:   H01L021/027, H01L021/268
  • 专利详细信息:   CN206758405-U 15 Dec 2017 H01L-021/268 201808 Pages: 7 Chinese
  • 申请详细信息:   CN206758405-U CN20353795 06 Apr 2017
  • 优先权号:   CN20353795

▎ 摘  要

NOVELTY - the patterned metal mask layer of this utility model claims a polymer layer for masking articles inducing graphene patterned laser comprises a substrate, formed on the substrate and is formed on the polymer layer. using the masking article for laser induced graphene patterning process, which can improve the processing precision of the porous graphene patterning process and processing operation is simplified, the cost is reduced.