• 专利标题:   Graphene film ball probe for atomic force microscope, has needle tip provided with spherical substrate and graphene layer, where graphene layer covers surface of spherical substrate and graphene layer is made of pure graphene.
  • 专利号:   CN106324291-A, CN106324291-B
  • 发明人:   HU Y, LIU S, LUO J, MA T, ZHANG C
  • 专利权人:   UNIV TSINGHUA, UNIV TSINGHUA
  • 国际专利分类:   G01Q060/26, G01Q060/40
  • 专利详细信息:   CN106324291-A 11 Jan 2017 G01Q-060/40 201712 Pages: 11 Chinese
  • 申请详细信息:   CN106324291-A CN10669303 15 Aug 2016
  • 优先权号:   CN10669303

▎ 摘  要

NOVELTY - The probe has a needle tip provided with a spherical substrate and a graphene layer. The graphene layer covers a surface of the spherical substrate, where the graphene layer is made of pure graphene. The graphene layer comprises a multi-layer graphene film. The graphene film is formed with ten layers. Thickness of the graphene film is 1-3 nm. The spherical substrate is made of silicon oxide material. Diameter of the spherical substrate is 5-10 microns. USE - Graphene film ball probe for an atomic force microscope. ADVANTAGE - The probe has better abrasion resistance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for obtaining friction coefficient of an atomic force microscope. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of a graphene film ball probe.