• 专利标题:   Graphene electronic device i.e. FET, for use in gas sensor, has interlayer dielectric formed on silicon substrate, insulating layer formed on interlayer dielectric, and graphene layer formed on insulating layer.
  • 专利号:   US2011210314-A1, KR2011098441-A, US8421131-B2
  • 发明人:   CHUNG H, BAEK S, SEO S, WOO Y, HEO J, SEO D, CHUNG H J, BAEK S J, SEO S A, WOO Y S, HEO J S
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SNU R DB FOUND, SAMSUNG ELECTRONICS CO LTD, SNU R DB FOUND, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/335, H01L029/66, H01L029/78
  • 专利详细信息:   US2011210314-A1 01 Sep 2011 H01L-029/66 201159 Pages: 17 English
  • 申请详细信息:   US2011210314-A1 US929817 17 Feb 2011
  • 优先权号:   KR018072

▎ 摘  要

NOVELTY - The device (100) has an insulating layer (112) provided on an interlayer dielectric (122). The interlayer dielectric is formed on a silicon substrate (110) to cover connecting lines (120), a source electrode (131) and a drain electrode (132). The interlayer dielectric exposes a portion of the electrodes. A graphene layer is formed on the insulating layer. An end of the graphene layer is connected to the source electrode, and another end is connected to the drain electrode. A gate electrode (133) is provided on the substrate and under the graphene layer. USE - Graphene electronic device i.e. FET, for use in a gas sensor (claimed). ADVANTAGE - The device allows an electronic circuit and the insulating layer to be fabricated at relatively high temperature and to be formed before transferring a graphene and low temperature processes performed at temperature of about 150 degree celsius or less to be performed after transferring the graphene, thus preventing or reducing damage to the graphene due to high temperature processes. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a method for fabricating a graphene electronic device (2) a gas sensor comprising a graphene electronic device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of a graphene electronic device. Graphene electronic device (100) Silicon substrate (110) Insulating layer (112) Connecting lines (120) Interlayer dielectric (122) Source electrode (131) Drain electrode (132) Gate electrode (133)