• 专利标题:   Integrated circuit apparatus for nanoelectronic applications, has source/drain regions spaced apart and relative to one another on heavily doped substrate, where cuts are formed in portions of graphene layer of transistor.
  • 专利号:   US2013334498-A1, US8637850-B2
  • 发明人:   DIMITRAKOPOULOS C D, FRANKLIN A D, SMITH J T
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   B82Y099/00, H01L029/78, H01L029/06
  • 专利详细信息:   US2013334498-A1 19 Dec 2013 H01L-029/78 201402 Pages: 8 English
  • 申请详细信息:   US2013334498-A1 US614199 13 Sep 2012
  • 优先权号:   US524191, US614199

▎ 摘  要

NOVELTY - The apparatus has a transistor i.e. back-gated FET (200), comprising a graphene layer (203) formed on a heavily doped substrate (201). Source/drain regions (204, 205) are spaced apart and relative to one another on the substrate, where the graphene layer comprises two portions. The portions are in contact with the respective source/drain regions, where cuts (230, 230-1, 230-2) are formed in the portions of the graphene layer to amplify transmission of carriers from the source/drain regions into the graphene layer. The cuts are formed perpendicular to the source/drain regions. USE - Integrated circuit apparatus for nanoelectronic applications. ADVANTAGE - The apparatus reduces contact resistance in graphene/metal contacts by forming the cuts in graphene in a contact region between the graphene and metal with high carrier mobility in an easy and cost-effective manner. The apparatus allows cut widths to remain as small as possible to avoid removing excessive amounts of the graphene in contact area. DESCRIPTION OF DRAWING(S) - The drawing shows an exploded perspective view of a FET. Back-gated FET (200) Heavily doped substrate (201) Graphene layer (203) Source/drain regions (204, 205) Cuts (230, 230-1, 230-2)