• 专利标题:   Graphene and carbon nano-tube vacuum vapor deposition apparatus using chemical vapor deposition (CVD) method, has hydrogen bottle that is connected with gas mass flow meter, and control panel that is connected on switch.
  • 专利号:   CN106011780-A
  • 发明人:   LIU S, CUI H, LIU X
  • 专利权人:   UNIV JILIN
  • 国际专利分类:   C23C016/26, C23C016/455, C23C016/458, C23C016/46, C23C016/52
  • 专利详细信息:   CN106011780-A 12 Oct 2016 C23C-016/26 201672 Pages: 13 Chinese
  • 申请详细信息:   CN106011780-A CN10464638 24 Jun 2016
  • 优先权号:   CN10464638

▎ 摘  要

NOVELTY - The apparatus has a water cooling system, a wind system, an electrode control system and a gas control system. Cooling circulating water is connected with a cooling water pipe. A stainless steel support is arranged in the internal portion of a reaction chamber. A cooling air cover is set outside the reaction chamber. A resistance wire heating plate is arranged on an insulating mica plate. A resistance wire heating plate is connected with anode and cathode power supply. A hydrogen bottle is connected with a gas mass flow meter. A control panel is connected on a switch. USE - Graphene and carbon nano-tube vacuum vapor deposition apparatus using chemical vapor deposition (CVD) method. ADVANTAGE - The service life of the experimental device is greatly prolonged. The temperature of the experimental reaction is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene and carbon nano-tube vacuum vapor deposition apparatus. Water-cooled copper pipe system (3) Stainless steel wire (5) Water outlet copper pipe (10) Air-cooled isolation hood (11) Air-cooled machine (12)