• 专利标题:   High pressure resistant carbon crystal plate comprises hard plastic plate and coating, where the coating is composed of graphene, chromium, zinc, titanium and silicon carbide, coating two surfaces with high-temperature resistant insulating.
  • 专利号:   CN106376108-A
  • 发明人:   MA X
  • 专利权人:   WUHU SANGLEJIN ELECTRONICS TECHNOLOGY CO
  • 国际专利分类:   C23C016/26, C23C016/513, H05B003/10, H05B003/20
  • 专利详细信息:   CN106376108-A 01 Feb 2017 H05B-003/20 201723 Pages: 5 Chinese
  • 申请详细信息:   CN106376108-A CN10808215 08 Sep 2016
  • 优先权号:   CN10808215

▎ 摘  要

NOVELTY - High pressure resistant carbon crystal plate comprises hard plastic plate and coating, where the coating is composed of 20-60 pts. wt. graphene, 5-10 pts. wt. chromium, 5-10 pts. wt. zinc, 5-15 pts. wt. titanium and 10-15 pts. wt. silicon carbide. Two surfaces are coated with high-temperature resistant insulating layer. USE - High pressure resistant carbon crystal plate. ADVANTAGE - High pressure resistant carbon crystal plate has high temperature annealing, high voltage resistance, and the preparation method is simple, raw material is easy to obtain. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing high pressure resistant carbon crystal plate, which involves: (A) adding deionized water to ultrasonic cleaning of hard plastic plate for 20 minutes at 40 to 70 degrees C; (B) using chemical vapor deposition furnace, and removing the surface residues by using argon; (C) depositing the sample of the graphene and placing in the high temperature tube furnace at 150 to 220 degrees C under vacuum; (D) annealing plate under pressure of 2 to 20Pa for 2 to 10 hours; (E) carrying out double frequency capacitively coupled plasma discharge technology and using methyl trimethoxy silane as the source gas, helium gas as carrier gas, argon as diluent gas under the temperature of 120-200 degrees C; (F) maintaining pressure deposition flow rate and depositing process according to need to adjust the source gas, carrier gas and diluent gas; and (G) taking out the deposited carbon crystal coating, then coating the two surfaces with high temperature resistant insulating layer.