• 专利标题:   Diode for semiconductors, has heterojunction device with vertical structure, which is indium tin oxide substrate, gallium oxide film, graphene film and aluminum electrode layer, from bottom to top.
  • 专利号:   CN114497277-A
  • 发明人:   XIANG J, JIA M, HAN T, TANG L
  • 专利权人:   KUNMING PHYSICS INST
  • 国际专利分类:   C23C014/04, C23C014/08, C23C014/18, C23C014/24, C23C014/35, C23C014/58, C23C016/01, C23C016/26, C23C028/00, H01L031/109, H01L031/18
  • 专利详细信息:   CN114497277-A 13 May 2022 H01L-031/18 202289 Chinese
  • 申请详细信息:   CN114497277-A CN11664243 30 Dec 2021
  • 优先权号:   CN11664243

▎ 摘  要

NOVELTY - Diode based on graphene/gallium oxide heterojunction has a heterojunction device with a vertical structure, which is an indium tin oxide (ITO) substrate 1, gallium oxide film 2, graphene film 3 and aluminum electrode layer 4, from the bottom to top. USE - Diode for semiconductors. ADVANTAGE - The diode has good chemical stability, controllable size, good rectification characteristics, high transparency and simple preparation method, and works at room temperature. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing the diode, which involves: a. etching a substrate by selecting the ITO substrate as the base, covering the ITO substrate with a tape mask, and adding into a dilute hydrochloric acid solution for etching; b. preparing the substrate by carrying out wet cleaning on the ITO substrate, drying with a nitrogen spray gun and utilizing a high temperature resistant tape mask at the etching step; c. sputtering the gallium oxide film by using a radio frequency magnetron sputtering method to prepare the gallium oxide film on the ITO substrate; d. subjecting the substrate loaded with the gallium oxide film to annealing treatment; e. preparing a graphene film by using chemical vapor deposition method; f. transferring the graphene film to the substrate; and g. evaporating electrodes by sticking the prepared device on a mask plate and utilizing a vacuum evaporation apparatus to evaporate aluminum electrodes. DESCRIPTION OF DRAWING(S) - The drawing shows schematic view of the diode. 1ITO substrate 2Gallium oxide film 3Graphene film 4Aluminium electrode layer