• 专利标题:   Method for constructing two-dimensional semiconductor device array, involves utilizing electron beam to evaporate metal mark, and removing glue and peeling off for obtaining patterned metal electrode.
  • 专利号:   CN116206982-A
  • 发明人:   LI X, LI P, DENG Y, CAO N
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   H01L021/34, H01L021/44, H01L029/45, H01L029/786
  • 专利详细信息:   CN116206982-A 02 Jun 2023 H01L-021/34 202355 Chinese
  • 申请详细信息:   CN116206982-A CN11629187 13 Dec 2022
  • 优先权号:   CN11629187

▎ 摘  要

NOVELTY - The method involves preparing a large-area two-dimensional semiconductor channel material. A working substrate is prepared with a metal mark. The working substrate is cleaned. Coating photoresist is spun on the processed working substrate. A patterned metal electrode is prepared. The coating photoresist spun on the working substrate is processed with patterned graphene electrode and two-dimensional semiconductor material. UV exposure photo-etching and developing processes are utilized. An electron beam is utilized to evaporate the metal mark. Glue and peeling off are removed for obtaining the patterned metal electrode. The working substrate is formed as a silicon dioxide/silicon (SiO2/Si) substrate and sapphire substrate. USE - Method for constructing a two-dimensional semiconductor device array based on a graphene electrode in microelectronic and device application fields. ADVANTAGE - The method enables realizing the controllable construction of the device array, and designing structure of the two-dimensional semiconductor/graphene vertical heterojunction can be utilized as an electrode under the physical field e.g. illumination and gate voltage field, and utilized as channel combined with pure two-dimensional semiconductor material channel. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for constructing a two-dimensional semiconductor device array based on a graphene electrode. (Drawing includes non-English language text).