• 专利标题:   Manufacture of invisible semiconductor device used in invisible airplanes, hidden clothes, military and civil fields, involves forming sacrificial layer, epitaxial layer and nano-column array comprising III-V group semiconductor material.
  • 专利号:   CN113782646-A
  • 发明人:   ZHOU M, XING Z, ZHAO Y, LU S, ZHANG J
  • 专利权人:   NANOTECH NANOBIONICS CHINESE ACADEMY, SUZHOU INST NANOTECH NANOBIONICS, SUZHOU NANO TECH NANO BIONICS SINANO
  • 国际专利分类:   B82Y010/00, B82Y040/00, H01L031/0224, H01L031/0236, H01L031/18, H01L033/42, H01L033/22, H01L033/00
  • 专利详细信息:   CN113782646-A 10 Dec 2021 H01L-033/00 202207 Chinese
  • 申请详细信息:   CN113782646-A CN10517504 09 Jun 2020
  • 优先权号:   CN10517504

▎ 摘  要

NOVELTY - Manufacture of invisible semiconductor device involves sequentially forming a sacrificial layer, an epitaxial layer and a nano-column array on the epitaxial substrate, where the insulating layer and the nano- column array include III-V group semiconductor material, setting at least an insulating material layer covering the nano column array, and processing at least one window on the insulation layer, exposing at least a portion of the nano columns from the window, providing a first electrode on the window of the insulation layer, and the first electrode is electrically connected to the nanosheet exposed from the windows, the second electrode is a transparent electrode, and setting a second electrode on a region other than the window is provided on the insulator layer, so as to form an invisible semiconducting device. USE - As invisible semiconductor device used in e.g. invisible airplanes, hidden clothes, military and civil fields, and for illumination, image display, missile detection, fire detection, radiation detection and secret communication. ADVANTAGE - The invisible semiconductor device has a long service life, and has a vertical nano-column array, so as to release the epitaxial stress and improve the crystal quality. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an invisible semiconductor device, which comprises substrate, an epitaxial layer, a nano-column array set on the epitaxial layer, an insulating material layer set on the surface of the nano-column array and a first electrode, and a second electrode. DESCRIPTION OF DRAWING(S) - GaN epitaxial layer (11) Indium gallium zinc nano-column (13) Silicon oxide layer (20) Graphene electrode (30) Ni/Au electrode (50)