• 专利标题:   Parylene based graphene transfer involves using chemical vapor deposition method to grow graphene on obtained metal substrate to obtain graphene plus metal structure.
  • 专利号:   CN111591984-A
  • 发明人:   LI Q, CHEN W, PENG H, LI T
  • 专利权人:   UNIV GUANGXI NORMAL
  • 国际专利分类:   C01B032/186, C01B032/194
  • 专利详细信息:   CN111591984-A 28 Aug 2020 C01B-032/194 202079 Pages: 8 Chinese
  • 申请详细信息:   CN111591984-A CN10497728 04 Jun 2020
  • 优先权号:   CN10497728

▎ 摘  要

NOVELTY - Parylene based graphene transfer involves using a chemical vapor deposition method to grow graphene on an obtained metal substrate to obtain a graphene plus metal structure, and then using an organic thin film deposition method on the graphene depositing parylene film on top to obtain parylene, graphene and metal structure. The electrolytic bubbling method is used to peel off the metal to obtain parylene plus graphene structure. The obtained target substrate is combined and heated to obtain parylene and graphite and base structure. The parylene film is peeled off by a mechanical peeling method to obtain the graphene plus base structure to complete the transfer. USE - Method for transferring graphene based on parylene. ADVANTAGE - The method transfers the graphene based on parylene in a simple, cost-effective and eco-friendly manner with improved mechanical and high-quality and clean graphene.