• 专利标题:   Semiconductor device e.g. graphene transistor has first and second boron carbon nitride (BCN) layers that are inserted between graphenes.
  • 专利号:   JP2015154006-A
  • 发明人:   HARADA N
  • 专利权人:   NAT INST ADVANCED IND SCI TECHNOLOGY
  • 国际专利分类:   B82Y030/00, B82Y040/00, H01L021/28, H01L021/331, H01L029/06, H01L029/737
  • 专利详细信息:   JP2015154006-A 24 Aug 2015 H01L-021/331 201558 Pages: 12 Japanese
  • 申请详细信息:   JP2015154006-A JP028858 18 Feb 2014
  • 优先权号:   JP028858

▎ 摘  要

NOVELTY - The device has first BCN layer (2a) that is inserted between a first graphene (1a) and a second graphene (1b). A second BCN layer (2b) is inserted between the second graphene and a third graphene (1c). The first graphene, the second graphene and the third graphene, and first and second BCN layers are arranged on a plane. A base electrode (4) is formed through an insulating film on second graphene. USE - Semiconductor device such as graphene transistor. ADVANTAGE - The reliable semiconductor device which combines the high mobility characteristic of the graphene and low leakage current is realizable. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the graphene transistor. (Drawing includes non-English language text) Graphenes (1a-1c) BCN layer (2a,2b) Emitter electrode (3) Base electrode (4) Collector electrode (5)