• 专利标题:   Method for manufacturing optical transmitting integrated module by using phosphorus graphene protection copper, involves fixing vertical cavity surface emitting laser chip in vicinity of surface plasmon grating pattern.
  • 专利号:   KR2016134498-A
  • 发明人:   JEON E K, LEE J J, KANG H S, KIM D S, KIM J E, LIM K S, HEO Y S, YU H Y, KIM Y S
  • 专利权人:   ELECTRONICS TELECOM RES INST
  • 国际专利分类:   G01N021/552, H01S005/183, H04B010/50
  • 专利详细信息:   KR2016134498-A 23 Nov 2016 G01N-021/552 201683 Pages: 10
  • 申请详细信息:   KR2016134498-A KR054506 03 May 2016
  • 优先权号:   KR066508

▎ 摘  要

NOVELTY - The method involves forming an optical transmitting integrated module with an upper side of silica cladding part for etching silica in a core. Copper is deposited in the upper side of the silica cladding part in order to be connected to a planar lightwave circuit (PLC). The copper is partly exposed where a surface plasmon grating pattern is formed on a portion of a graphene sheet. An electrode is formed with a gold bumper to electrically fixing with a vertical cavity surface emitting laser (VCSEL) chip in a vicinity of surface plasmon grating pattern. USE - Method for manufacturing optical transmitting integrated module by using phosphorus graphene protection copper. ADVANTAGE - The method enables realizing an active optical alignment operation of a distributed feed back-type laser diode, lens, arrayed waveguide grating device with a surface plasma polariton optical wave guide by using the graphene protection copper. The method enables reducing sorting time period of a manual optical alignment through a marker and complementary metal oxide semiconductor manufacturing time period. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a method manufacturing optical transmitting integrated module by using phosphorus graphene protection copper.