▎ 摘 要
NOVELTY - The method involves forming an optical transmitting integrated module with an upper side of silica cladding part for etching silica in a core. Copper is deposited in the upper side of the silica cladding part in order to be connected to a planar lightwave circuit (PLC). The copper is partly exposed where a surface plasmon grating pattern is formed on a portion of a graphene sheet. An electrode is formed with a gold bumper to electrically fixing with a vertical cavity surface emitting laser (VCSEL) chip in a vicinity of surface plasmon grating pattern. USE - Method for manufacturing optical transmitting integrated module by using phosphorus graphene protection copper. ADVANTAGE - The method enables realizing an active optical alignment operation of a distributed feed back-type laser diode, lens, arrayed waveguide grating device with a surface plasma polariton optical wave guide by using the graphene protection copper. The method enables reducing sorting time period of a manual optical alignment through a marker and complementary metal oxide semiconductor manufacturing time period. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a method manufacturing optical transmitting integrated module by using phosphorus graphene protection copper.