• 专利标题:   Method of manufacturing grapheme used in FET, involves forming graphene on catalyst layer by cooling catalyst layer, and taking out supporting belt, on which catalyst layer is loaded and graphene is formed, from chamber to outside.
  • 专利号:   US2012025413-A1, KR2012011921-A, KR1793683-B1
  • 发明人:   CHO S, WON D, CHO S M, WON D K, CHO S H
  • 专利权人:   SAMSUNG TECHWIN CO LTD, SAMSUNG TECHWIN CO LTD, HANWHA TECHWIN CO LTD
  • 国际专利分类:   B29C039/14, C01B031/02, C23C014/06, C23C014/56
  • 专利详细信息:   US2012025413-A1 02 Feb 2012 B29C-039/14 201211 Pages: 10 English
  • 申请详细信息:   US2012025413-A1 US191897 27 Jul 2011
  • 优先权号:   KR072486

▎ 摘  要

NOVELTY - The method involves placing a supporting belt (30), on which a catalyst metal layer (401) is loaded, into a chamber (100). A temperature of the catalyst layer is increased and a carbon source is injected into the chamber. Graphene is formed on the catalyst layer by cooling the catalyst layer. The supporting belt on which the catalyst layer is loaded and the graphene is formed is taken out from the chamber to an outside.A ratio of a melting point of the supporting belt to a maximum temperature of the catalyst layer that the catalyst layer is heated in the chamber is equal to or less than 0.6. USE - Method of manufacturing graphene used in FET, biosensor, nano composite and quantum device. ADVANTAGE - The defects that can occur during the synthesis of the graphene in the manufacturing process can be reduced by washing the surface of the catalyst metal layer using an acid/alkali solution before the catalyst metal layer is transported to the chamber. The deformation of the catalyst metal layer and quality degradation of the graphene due to the self-weight of the catalyst metal layer can be prevented, when the supporting belt supports the entire catalyst metal layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for apparatus for manufacturing graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the system for manufacturing of graphene. Reels (10,20) Supporting belt (30) Chamber (100) Heater (140) Catalyst metal layer (401)