• 专利标题:   MOSFET, has source/drain region formed on semiconductor substrate, and gate conductor extended toward upper part of source/drain region, where semiconductor substrate is formed with oxide semiconductor substrate and graphene layer.
  • 专利号:   CN103378149-A
  • 发明人:   CHEN L, LUO Z, ZHU Z
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/336, H01L029/423, H01L029/78
  • 专利详细信息:   CN103378149-A 30 Oct 2013 H01L-029/78 201403 Pages: 13 Chinese
  • 申请详细信息:   CN103378149-A CN10118877 20 Apr 2012
  • 优先权号:   CN10118877

▎ 摘  要

NOVELTY - The MOSFET has a source/drain region formed on a semiconductor substrate. A channel region is arranged on the source/drain region. Portions of the channel region and the source/drain region are respectively matched with a gate dielectric and a gate conductor. The gate conductor is extended toward an upper part of the source/drain region. The insulating spacer layer is formed between the gate dielectric and the source/drain region. The channel region is matched with the insulating spacer layer. The semiconductor substrate is formed with an oxide semiconductor substrate and a graphene layer. USE - MOSFET. ADVANTAGE - The MOSFET reduces parasitic resistance. DETAILED DESCRIPTION - The insulating spacer layer is made of silicon nitride (Si3N4), silicon di-oxide (Si02), aluminum oxide (Al203), hafnium oxide (HfO2), zirconium dioxide (ZrO2), titanium oxide (TiO2), lanthanum oxide (La203), bismuth oxide (Bi203), Tantalum oxide (Ta2O3), nitrogen oxide (NiO), copper oxide (CuO), vanadium oxide (V2O5), Niobium pentoxide (Nb2O5), lanthanum aluminum oxide (LaAlO3), strontium titanate (SrTi03), lanthanum titanate (LaTiO3), lanthanum vanadate (LaVO3), lithium niobate (LiNbO3), lead zirconate (PbZrO3), lead titanate (PbTiO3), lithium tantalate (LiTaO3) or potassium tantalate (KTaO3) material. An INDEPENDENT CLAIM is also included for an MOSFET manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of an MOSFET.