• 专利标题:   Device for transferring micro LED to temporary substrate using shape memory material, has movement module for moving first transfer unit and second transfer unit along X-axis, Y-axis and Z-axis directions.
  • 专利号:   KR2022119778-A, KR2454699-B1
  • 发明人:   LEE J G, PARK H, KIMSUNJOO, PARK J, KIM B G
  • 专利权人:   COWINDST CO LTD
  • 国际专利分类:   H01L021/67, H01L021/683, H01L025/075
  • 专利详细信息:   KR2022119778-A 30 Aug 2022 H01L-021/67 202273 Pages: 14
  • 申请详细信息:   KR2022119778-A KR023021 22 Feb 2021
  • 优先权号:   KR023021

▎ 摘  要

NOVELTY - The device has a transfer unit for attaching and detaching multiple micro LEDs disposed on a circular substrate, and changing an X-axis interval between the micro LEDs by controlling a shape memory member (110). A movement module is provided for moving a first transfer unit (100) and a second transfer unit (300) in the X, Y-axis and Z-axis. A pitch adjustment groove (112) and an attachment surface (113) are repeatedly formed in an expansion and contraction direction by pressing with a roller at a temperature. A graphene layer is interposed between the memory member and an adhesive layer. The micro LEDs are disposed in a square region that is inscribed with the circular substrate. USE - Device for transferring micro LED to temporary substrate using shape memory material. ADVANTAGE - The device aligns the micro LEDs manufactured on the growth substrate from a growth substrate to the temporary substrate while minimizing process time. The device applies characteristics of a formative memory material during transfer process, so that distance between micro LEDs can be adjusted, production time for high-resolution and large-area display panels can be significantly reduced, and maintenance and management of the device can be performed in a convenient manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for transferring micro LED to temporary substrate using shape memory material. DESCRIPTION OF DRAWING(S) - The drawing shows a plan view that shows a microLED disposed on a circular substrate. 100First transfer unit 110Shape memory member 112Pitch adjustment groove 113Attachment surface 300Second transfer unit