• 专利标题:   Conduction characteristics measuring apparatus e.g. conduction characteristics evaluation apparatus has graphene sheet layer for coating nanotube, that is coated with metal coating layer.
  • 专利号:   US2009243637-A1, JP2009243999-A, JP4644723-B2
  • 发明人:   HIROOKA M, OKAI M
  • 专利权人:   HITACHI HIGH TECHNOLOGIES CORP, HITACHI HIGH TECHNOLOGIES CORP
  • 国际专利分类:   G01R027/00, G01N013/10, G01N027/04, G01R001/067, G01Q070/12
  • 专利详细信息:   US2009243637-A1 01 Oct 2009 G01R-027/00 200969 Pages: 13 English
  • 申请详细信息:   US2009243637-A1 US412113 26 Mar 2009
  • 优先权号:   JP089169

▎ 摘  要

NOVELTY - A nanotube probe (801) has a nanotube having multilayer coaxial tubular structure with openings at both ends. A graphene sheet layer formed by the vapor deposition method, has flake materials for coating the nanotube. The graphene sheet layer is coated with a metal coating layer. USE - Conduction characteristic measuring apparatus such as conduction characteristics evaluation apparatus and probe microscope. ADVANTAGE - The contact resistance between the probe and the needle substrate can be reduced by coating the nanotube with graphene sheet layer and wettability with respect to metal material can be improved reliably. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the conduction characteristics evaluation apparatus. Nanotube probe (801) Controller (804) Sample under measurement (805)