• 专利标题:   Capacitive gas sensor used in industrial structure for health, environment, agriculture, and national defense, has porous structure that is located between upper electrode and lower electrode facing upper electrode.
  • 专利号:   WO2022114660-A1, KR2022072618-A, KR2489142-B1
  • 发明人:   CHOA Y, PAKR J Y, LIM M S, CHO H, LEE H, LIMMINSUP
  • 专利权人:   UNIV HANYANG IND COOP FOUND
  • 国际专利分类:   G01N027/22, G01N033/00
  • 专利详细信息:   WO2022114660-A1 02 Jun 2022 202252 Pages: 34
  • 申请详细信息:   WO2022114660-A1 WOKR016893 17 Nov 2021
  • 优先权号:   KR160431

▎ 摘  要

NOVELTY - The capacitive gas sensor has a sensitive material for adsorbing and desorbing a target gas, an upper electrode surrounding the sensitive material, a lower electrode facing the upper electrode, and a porous structure located between the upper electrode and the lower electrode. The capacitance of the sensitive material changes as the sensitive material adsorbs and desorbs the target gas. The target gas includes one of methanol gas, a toluene gas, and an acetone gas. The frequency of the voltage applied to the upper electrode and the lower electrode is differently controlled according to the type of the target gas. USE - Capacitive gas sensor used in industrial structure for health, environment, agriculture, and national defense. ADVANTAGE - The capacitive gas sensor having improved response speed and recovery speed can be provided. The capacitive gas sensor can selectively sense one of methanol gas, toluene gas, and acetone gas according to the frequency of the voltage applied to the upper electrode and the lower electrode. Since the noise due to the phase difference is reduced, the sensing sensitivity is improved, and the sensor can be easily driven at room temperature. Since the capacitive gas sensor can be driven at room temperature, the miniaturization is easy and power consumption can be effectively reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing capacitive gas sensor. DESCRIPTION OF DRAWING(S) - The drawing shows the flowchart illustrating the process for manufacturing capacitive gas sensor. (Drawing includes non-English language text) Step for preparing porous structure (S100) Step for forming upper electrode on the upper surface of the porous structure (S200) Step for forming lower electrode on the lower surface of the porous structure (S300) Step for providing source solution including the sensitive material to the exposed region of the upper surface of the porous structure (S400)