• 专利标题:   Formation of graphene nanopattern used in manufacture of graphene-containing device, involves forming block copolymer including regions on graphene layer and forming mask pattern as etching mask by removing regions, and pattering.
  • 专利号:   EP3116025-A1, US2017011930-A1, CN106340442-A, KR2017006208-A, US2017229546-A1, US9748108-B2, US9929238-B2
  • 发明人:   JEONG S, PARK S, LEE Y, ZHENG C, LI R, JEONG S J, PARK S J, LEE Y S
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   B82Y010/00, B82Y040/00, H01L029/06, H01L029/16, H01L029/66, H01L029/775, H01L029/778, H01L021/3065, H01L021/308, H01L021/02, H01L021/027, H01L021/033, H01L021/314, H01L021/04, H01L021/8234, H01L027/088, H01L029/786, H01L021/467, H01L051/00
  • 专利详细信息:   EP3116025-A1 11 Jan 2017 H01L-029/66 201708 Pages: 44 English
  • 申请详细信息:   EP3116025-A1 EP169421 12 May 2016
  • 优先权号:   KR096788

▎ 摘  要

NOVELTY - Formation of graphene nanopattern involves forming a graphene layer (200) on a substrate, forming a block copolymer layer (300) including regions (30A) and regions (30B), on the graphene layer and a region of the substrate which is not covered by the graphene layer, forming a mask pattern (300M) from the block copolymer layer (300) by removing regions (30A) and/or regions (30B) of the block copolymer, and patterning the graphene layer in a nanoscale using the mask pattern as an etching mask. USE - Formation of graphene nanopattern used in manufacture of graphene-containing device (all claimed). Uses include but are not limited to transistor, tunneling device, memory device, solar cell, photodetector, sensor and light-emitting device. ADVANTAGE - The method enables efficient and simple formation of graphene nanopattern. The graphene-containing device formed using the graphene nanopattern has high density. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) manufacture of graphene-containing device; and (2) graphene-containing device. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of forming the graphene nanopattern. Regions (30A,30B) Substrate (100) Underlayer (110) Graphene layer (200) Block copolymer layer (300)