• 专利标题:   Suspending a graphene membrane on a support structure, comprises separating graphene from bulk graphite, attaching the graphene to a substrate, and attaching a pre-fabricated support structure having gaps to the graphene.
  • 专利号:   US2012183738-A1
  • 发明人:   ZETTL A K, MEYER J C
  • 专利权人:   UNIV CALIFORNIA
  • 国际专利分类:   B32B003/24, B32B038/10, B32B009/00, B82Y030/00, C23C014/30
  • 专利详细信息:   US2012183738-A1 19 Jul 2012 B32B-003/24 201249 Pages: 14 English
  • 申请详细信息:   US2012183738-A1 US420226 14 Mar 2012
  • 优先权号:   US039002P, US420226

▎ 摘  要

NOVELTY - The method comprises separating the graphene from bulk graphite, attaching graphene to a substrate, attaching a pre-fabricated support structure having gaps to the graphene, separating the graphene and the pre-fabricated support structure from the substrate that leaves a graphene membrane suspended on the pre-fabricated support structure and suspended across two of the gaps in the pre-fabricated support structure, and heating the pre-fabricated support structure having the graphene membrane suspended across the gap. USE - The method is useful for suspending a graphene membrane on a support structure of a graphene-based structure for depositing material such as amorphous carbon on the graphene membrane (all claimed), where the suspended graphene membrane is useful: for high-volume commercial products and specialized research toots such as electron microscopy support; as a support in transmission electron microscopy imaging; for a direct visualization of individualized carbon atoms, vacancies, carbon chains and monolayer adsorbates and their dynamics on graphene membranes; for nanoelectromechanical systems applications; as sensitive chemical detectors; as part of a tuned electromechanical circuit and filter; and as a basis for nanoelectronics or nanothermal devices. ADVANTAGE - The method is capable of easily, efficiently and economically suspending the graphene membrane on the support structure thus enabling direct transmission electron microscopy visualization of ultra-low contrast objects. DETAILED DESCRIPTION - The method comprises separating the graphene from bulk graphite, attaching graphene to a substrate, attaching a pre-fabricated support structure having gaps to the graphene, separating the graphene and the pre-fabricated support structure from the substrate that leaves a graphene membrane suspended on the pre-fabricated support structure and suspended across two of the gaps in the pre-fabricated support structure, and heating the pre-fabricated support structure having the graphene membrane suspended across the gap. The step of attaching the pre-fabricated support structure comprises placing the pre-fabricated support structure on the graphene, immersing the pre-fabricated support structure and the graphene in a solvent that removes excess adhesive, evaporating the solvent, which attaches the pre-fabricated support structure to the graphene, applying an adhesive to a surface of the pre-fabricated support structure, bringing the adhesive into contact with the graphene, and attaching the pre-fabricated support structure to the substrate beyond, where the pre-fabricated support structure attaches to the graphene. The step of attaching the graphene to the substrate comprises attaching the graphene to a sacrificial surface of the substrate. The step of separating the graphene and the pre-fabricated support structure from the substrate comprises etching the sacrificial surface by immersing the sacrificial surface and the graphene in an etch solution, placing a solvent adjacent to an edge of the prefabricated support structure that expands beneath the prefabricated support structure and the graphene and causes the pre-fabricated support structure with the graphene membrane suspended across the gap to release from the substrate, and pulling the pre-fabricated support structure, which leaves the graphene attached to the pre-fabricated support structure by the adhesive. The pre-fabricated support structure comprises a transmission electron microscopy grid. INDEPENDENT CLAIMS are included for: (1) a method of depositing material; and (2) a graphene-based structure. DESCRIPTION OF DRAWING(S) - The diagram shows an electron microscopic view of a graphene membrane.