• 专利标题:   Light detection element for detecting light, has one electrode which is in contact with graphene layer, where another electrode is in contact with graphene layer and comprises different material from one electrode.
  • 专利号:   JP2021093415-A
  • 发明人:   SUDA S
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   H01L031/08, H01L031/10
  • 专利详细信息:   JP2021093415-A 17 Jun 2021 H01L-031/08 202155 Pages: 21 Japanese
  • 申请详细信息:   JP2021093415-A JP221996 09 Dec 2019
  • 优先权号:   JP221996

▎ 摘  要

NOVELTY - The detection element (100) has a substrate (10) that is provided with a recess portion (12) or protrusions on surface. The graphene layer is provided along the recessed portion or the convex portion. The first electrode is in contact with the graphene layer (40), and second electrode is in contact with the graphene layer and has a different material from the first electrode. The first electrode and the second electrode are made of materials having different Seebeck coefficients. The bottom surface of the recess portion has a portion that is inclined with respect to the depth direction of the recess portion. USE - Light detection element for detecting light using optical thermoelectric effect of graphene. ADVANTAGE - The light reception sensitivity is improved. The scattering of electrons in the graphene layer is reduced, and the mobility of electrons are improved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of a light detection element. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of light detection element. Substrate (10) Recess portion (12) Insulating layer (30) Graphene layer (40) Light detection element (100)