• 专利标题:   Graphene device manufacturing method, involves forming PMMA layer on PVA layer, where thicknesses of PVA layer and PMMA layer are in specific range, and graphene layer formed in PMMA layer.
  • 专利号:   CN103646855-A, CN103646855-B
  • 发明人:   WANG H, JIANG M, XIE X, WU T, SUN Q, XIE H
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01L021/04
  • 专利详细信息:   CN103646855-A 19 Mar 2014 H01L-021/04 201432 Pages: 14 Chinese
  • 申请详细信息:   CN103646855-A CN10713413 20 Dec 2013
  • 优先权号:   CN10713413

▎ 摘  要

NOVELTY - The method involves forming a PVA layer on a substrate. An upper part of a PMMA layer is formed on the PVA layer, where thickness of the PVA layer is 80 to 120 nm and the PMMA layer is 180 nm to 250 nm. A graphene layer is formed in the PMMA layer. A graphene-containing layer is arranged on an upper part of a first metal layer, where thickness of the first metal layer is 50 nm to 100 nm. An upper part of a gate dielectric layer is arranged on the graphene layer and formed with second layer. A metal top gate electrode is located between source and drain electrodes of the gate dielectric layer. USE - Graphene device manufacturing method. ADVANTAGE - The method enables realizing graphene device from substrate and ensuring wide application range of the graphene device. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a graphene device manufacturing method.'(Drawing includes non-English language text)'