• 专利标题:   Stack structure useful in electronic device comprises silicon substrate, under layer formed on the silicon substrate, epitaxial graphene layer formed on under layer, nickel layer and copper layer between silicon substrate and nickel layer.
  • 专利号:   US2009294759-A1, KR2009124330-A, US8159037-B2, KR1490111-B1
  • 发明人:   CHUNG H, JEON D, KIM D, SEO S, WOO Y, CHUNG H J, JEON D Y, KIM D C, SEO S A, WOO Y S
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/20, H01L029/06, H01L021/336, H01L029/78, H01L021/02
  • 专利详细信息:   US2009294759-A1 03 Dec 2009 H01L-029/06 200981 Pages: 14 English
  • 申请详细信息:   US2009294759-A1 US230487 29 Aug 2008
  • 优先权号:   KR050467

▎ 摘  要

NOVELTY - A stack structure comprises a Si substrate; an under layer formed on the Si substrate; at least one epitaxial graphene layer formed on the under layer; Ni layer between the Si substrate and the under layer; and Cu layer between the Si substrate and the Ni layer. The under layer is a hexagonal boron nitride layer. The under layer is a 3C-SiC layer. USE - As a stack structure useful in electronic device (claimed). ADVANTAGE - The structure including the graphenes easily applied to various electronic devices. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for following: (1) forming a stack structure involving forming an under layer on a Si substrate; and growing at least one epitaxial graphene layer on the under layer; and (2) electronic device comprising the stack structure.