• 专利标题:   Improvement of conductivity of atmospheric pressure chemical vapor deposited graphene film, involves surface cleaning copper foil, high temperature heat-treating treated copper foil, heating, and introducing methane.
  • 专利号:   CN107217239-A
  • 发明人:   LIU Q, SU D, PENG J
  • 专利权人:   UNIV SOUTH CHINA TECHNOLOGY, GUANGZHOU JINTAI TECHNOLOGY CO LTD
  • 国际专利分类:   C23C016/02, C23C016/26
  • 专利详细信息:   CN107217239-A 29 Sep 2017 C23C-016/02 201776 Pages: 8 Chinese
  • 申请详细信息:   CN107217239-A CN10447695 14 Jun 2017
  • 优先权号:   CN10447695

▎ 摘  要

NOVELTY - The improvement of conductivity of atmospheric pressure chemical vapor deposited graphene film involves (i) surface cleaning the copper foil, (ii) high temperature heat treating the treated copper foil at 700-1000 degrees C for 5-7 hours at argon flow rate of 200-500 sccm, and hydrogen flow rate of 0-50 sccm, (iii) heating the heat-treated copper foil at 900-1050 degrees C under argon-and-hydrogen protection conditions, introducing methane, (iv) terminating the introduction of methane and hydrogen, maintaining introduction of argon, cooling, and growing a graphene film on a copper substrate. USE - Improvement of conductivity of atmospheric pressure chemical vapor deposited graphene film (claimed). ADVANTAGE - The method improves the conductivity of atmospheric pressure chemical vapor deposited graphene film easily by simple process at low cost, without using additional equipment, and greatly reduces the square resistance of the graphene film.