• 专利标题:   Transferring graphene layer onto target substrate or support structure by obtaining metal foil onto which graphene layer is provided, placing metal foil having graphene layer and cellulose-based polymer layer stacked on it, diluting and/or neutralizing etching solution, and dry cleaning.
  • 专利号:   EP4011828-A1
  • 发明人:   PEDRAZO TARDAJOS A, BALS S
  • 专利权人:   UNIV ANTWERPEN
  • 国际专利分类:   C01B032/194
  • 专利详细信息:   EP4011828-A1 15 Jun 2022 C01B-032/194 202256 Pages: 24 English
  • 申请详细信息:   EP4011828-A1 EP213252 10 Dec 2020
  • 优先权号:   EP213252

▎ 摘  要

NOVELTY - Method for transferring a graphene layer onto a target substrate or support structure involves obtaining a metal foil (12) onto which the graphene layer (11) which is provided, stabilizing the graphene layer by applying a layer (13) of a cellulose-based polymer onto the graphene layer, placing the metal foil having respectively the graphene layer and the cellulose-based polymer layer stacked on it in or on an etching solution (25) to dissolve the metal foil supporting the graphene layer, diluting and/or neutralizing the etching solution after the metal foil has been dissolved, depositing the graphene layer directly onto the target substrate or structure (20) by placing the target substrate or structure underneath the graphene layer floating in or on the diluted and/or neutralized etching solution and removing the diluted and/or neutralized etching solution until the graphene layer settles onto the target substrate or structure, and dry cleaning. USE - The method is used for transferring a graphene layer onto a target substrate or support structure, which is used in an electron microscopy sample support grid (claimed), as a sample support in (e.g. transmission) electron microscopy, e.g. in a transmission electron microscopy (TEM) grid, and in other applications such as graphene sensors and/or micro-electro-mechanical systems (MEMS) devices. ADVANTAGE - The method provides a good, reliable, clean, uniform, and/or homogeneous graphene (mono)layer on a target substrate or structure. The method achieves a good (e.g. uniform, continuous, large area) coverage and/or high flatness of the graphene layer on such target substrate or structure. The method transfers the graphene to the target substrate or structure such as to remain intact or substantially intact. The method transfers the graphene to the target substrate or structure without or with little contamination, such as contamination by polymers or other organic compounds used in the preparation process. The method provides target structure with a clean and high-quality graphene (mono)layer deposited on it. The graphene can provide a layer having an advantageously low thickness, high thermal conductivity, high electrical conductivity and/or reproducible (good) uniformity. The sample support can reduce wastage of resources, time and/or samples in electron microscopy and similar applications due to failed experiments. The product advantageously reduces and/or homogenizes a background signal obtained when imaging a specimen with TEM or related techniques, thus allowing a simple numerical subtraction. The product reduces or avoids artefacts during charged particle (e.g. electron) microscopy to a non-conductive specimen. The clean and thin graphene supports enable or improve the investigation of soft materials, such as surface ligands, or other low-contrast materials by electron microscopy. DETAILED DESCRIPTION - Method for transferring a graphene layer onto a target substrate or support structure involves obtaining a metal foil (12) onto which the graphene layer (11) which is provided, stabilizing the graphene layer by applying a layer (13) of a cellulose-based polymer onto the graphene layer, placing the metal foil having respectively the graphene layer and the cellulose-based polymer layer stacked on it in or on an etching solution (25) to dissolve the metal foil supporting the graphene layer, diluting and/or neutralizing the etching solution after the metal foil has been dissolved, depositing the graphene layer directly onto the target substrate or structure (20) by placing the target substrate or structure underneath the graphene layer floating in or on the diluted and/or neutralized etching solution and removing the diluted and/or neutralized etching solution until the graphene layer settles onto the target substrate or structure, and dry cleaning the target substrate or structure with the graphene layer deposited on it to remove the cellulose-based polymer layer by embedding the target substrate or structure with the graphene layer in activated carbon and heating the activated carbon. An INDEPENDENT CLAIM is included for an electron microscopy sample support grid, comprising a substrate or support structure, and a graphene layer, forming a sample support, positioned on the substrate or support structure, where the graphene layer has a thickness of less than 2 nm. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a method for transferring a graphene layer onto a target substrate or support structure. Graphene layer (11) Metal foil (12) Layer (13) Target substrate (20) Etching solution (25)