• 专利标题:   Suspended structure i.e. top gate structure, for use in graphene device, has graphene layer on surface of substrate, and dielectric e.g. vacuum, interposed between electrically conductive suspended structure and graphene layer.
  • 专利号:   US2009225592-A1, US7948042-B2
  • 发明人:   LAU C N, LIU G, VELASCO J
  • 专利权人:   UNIV CALIFORNIA, UNIV CALIFORNIA
  • 国际专利分类:   G11C011/18, H01L021/04, H01L021/4763, H01L043/06, H01L029/84
  • 专利详细信息:   US2009225592-A1 10 Sep 2009 G11C-011/18 200962 Pages: 25 English
  • 申请详细信息:   US2009225592-A1 US397183 03 Mar 2009
  • 优先权号:   US033222P, US397183

▎ 摘  要

NOVELTY - The structure (510) has an electrically conductive structure suspended above surface of a substrate (502), and a graphene layer on the surface of the substrate and beneath the suspended electrically conductive structure. A dielectric e.g. air and vacuum, is interposed between the electrically conductive suspended structure and the graphene layer. The graphene layer has a thickness in a range between one tenth of a nanometer (nm) and five nm. A bridge element is at distance ranging between about 100 to 300 nm above the surface of the substrate. USE - Suspended structure i.e. top gate structure, for use in a graphene device i.e. graphene p-n-p junction device, as a local current carrying wire for inducing a local magnetic field in a magnetic storage device (claimed). Can also be used for a point contact for local injection of current, and moving part in microelectromechanical device. ADVANTAGE - The dielectric simplifies fabrication procedure for the production of suspended structure, reduces manufacturing costs, eliminates unintentional damage to or doping of devices, and makes the structure compatible with large-scale complementary metal oxide semiconductor (CMOS) technology. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a method for preparation of suspended structures (2) a suspended structure system comprising a set of base elements. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a system with suspended structures. Substrate (502) Device (504) Electrodes (506) Suspended structure (510)