• 专利标题:   Forming method for semiconductor device, e.g. complementary metal oxide semiconductor (CMOS) integrated circuits involves forming fuse that includes graphene layer and electrically connected to FET.
  • 专利号:   US2014038365-A1, US8735242-B2
  • 发明人:   ZHU W
  • 专利权人:   INT BUSINESS MACHINES CORP, INT BUSINESS MACHINES CORP
  • 国际专利分类:   B82Y040/00, H01L021/336, H01L021/8238
  • 专利详细信息:   US2014038365-A1 06 Feb 2014 H01L-021/336 201412 Pages: 13 English
  • 申请详细信息:   US2014038365-A1 US563673 31 Jul 2012
  • 优先权号:   US563673

▎ 摘  要

NOVELTY - The forming method involves forming a FET (190), and a fuse (195) that includes a graphene layer (150) and electrically connected to the FET. The forming of fuse is comprised of forming the fuse in series with the FET and a fuse terminal on an end portion of the graphene layer. An isolation region (104) and well region (106) are formed in a substrate (102), and the source and drain regions (108a) are formed in the well region. A gate dielectric layer (111) is formed on the well region, and a gate electrode (110) is formed on the gate dielectric layer. USE - Forming method for semiconductor device, e.g. CMOS integrated circuits. ADVANTAGE - Ensures that the semiconductor device can be effectively blown by application of voltage to the graphene layer since the dimensions of the graphene layer can be sufficiently small. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a semiconductor device. Substrate (102) Isolation region (104) Well region (106) Source and drain regions (108a) Gate electrode (110) Gate dielectric layer (111) Graphene layer (150) FET (190) Fuse (195)