• 专利标题:   Composite graphene nano-sheet used in coating silicon nano-cone for corner crimping machine comprises surface with silicon nano-cone array substrate forming nano-layer of graphene on surface of silicon cone array.
  • 专利号:   CN103193220-A
  • 发明人:   TIAN S, LI J, GU C, LI L, SUN W, XIA X
  • 专利权人:   CHINESE ACAD SCI PHYSICS INST
  • 国际专利分类:   B82Y030/00, B82Y040/00, C01B031/04, C23C016/26, C23C016/44
  • 专利详细信息:   CN103193220-A 10 Jul 2013 C01B-031/04 201379 Pages: 12 Chinese
  • 申请详细信息:   CN103193220-A CN10467923 19 Nov 2012
  • 优先权号:   CN10467923

▎ 摘  要

NOVELTY - A composite graphene nano-sheet comprises a surface with silicon nano-cone array substrate forming a nano-layer of graphene on the surface of the silicon cone array. USE - Composite graphene nano-sheet used in coating silicon nano-cone for corner crimping machine. ADVANTAGE - The graphene nano-array structure controls the structure and growth parameters of the substrate, thus obtaining excellent field emission characteristics, high adhesion and super hydrophobicity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the application of graphene nano-sheet onto the surface of the silicon cone array involving inductive coupled plasma etching on substrate, hot filament chemical vapor deposition system at a base vacuum of 0.1 Torr at 900-1100 degrees C in argon, hydrogen and methane in a ratio of 50:5-49:1 at 20-30 Torr and applying a bias voltage of 380V. DESCRIPTION OF DRAWING(S) - The drawing is a cross section of the graphene nano-sheet array composite structure.