▎ 摘　　要

NOVELTY - The modulator has a substrate (7), a micro-ring waveguide structure (5), a phase modulation structure (1), a signal modulation structure (2), a modulation coupling structure (3) and an MZ modulator (6) comprising an adjustable beam splitter. The micro-ring waveguide structure integrates a phase modulating structure and a signal modulating structure and maintains a fixed spacing with a modulating coupling structure of the same curvature. The graphene layer is wrapped. The modulation coupling structure wraps the graphene layer. The adjustable beam splitter wraps the graphene layer. A graphene layers (16, 17, 18) are separated from the waveguide material and the cladding material by a thickness of separation medium (13, 14, 15). The graphene layers extend away from the waveguide and are connected to an electrodes (9, 10, 11) respectively. The substrate material is silicon dioxide. The isolating media is hexagonal boron nitride. USE - High-linearity micro-ring auxiliary Mach-Zehnder (MZ) modulator for linearized integrated optoelectronic device. ADVANTAGE - The working wavelength of the modulator is tunable by changing the chemical potential of the graphene layer to modulate the modulation process of the micro-ring auxiliary MZ modulator, so as to reach the required high linearity and high extinction ratio requirement. The coupling efficiency is adjusted to the value needed by the value by introducing the graphene structure in the micro ring coupling can be designed structure size in advance under the condition of adding base bias, and by changing the graphene bias mode to fine coupling the environment. The relative high precision of the coupling is realized. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of a three-dimensional structure of a graphene-based high-linearity micro-ring auxiliary MZ modulator, wrapping graphene by a phase modulation structure and a coupling modulation structure, and wrapping graphene by an adjustable beam splitter. Phase modulation structure (1) Signal modulation structure (2) Modulation coupling structure (3) Micro-ring waveguide structure (5) MZ modulator (6) Substrate (7) Electrodes (9,10,11) Separation medium (13,14,15) Graphene layers (16,17,18)