• 专利标题:   Electromagnetic device i.e. terahertz emission device, for use in e.g. laser for medical imaging applications, has metallization layer forming electrodes such that terahertz frequency radiation is generated when graphene is excited.
  • 专利号:   US2013015375-A1, US8805148-B2
  • 发明人:   AVOURIS P, SUNG C, VALDES G A, XIA F
  • 专利权人:   INT BUSINESS MACHINES CORP, INT BUSINESS MACHINES CORP
  • 国际专利分类:   B82Y020/00, H01L033/58, G02B006/10
  • 专利详细信息:   US2013015375-A1 17 Jan 2013 H01L-033/58 201310 Pages: 12 English
  • 申请详细信息:   US2013015375-A1 US182621 14 Jul 2011
  • 优先权号:   US182621

▎ 摘  要

NOVELTY - The device has a graphene layer formed on a silicon carbide substrate (102) i.e. wafer. A metallization layer is patterned on graphene, where the metallization layer forms electrodes such that terahertz frequency radiation is generated when the graphene is excited. The metallization layer forms a coplanar waveguide and an antenna over the graphene. An optical waveguide is integrated with the graphene and integrated into the substrate. The optical waveguide is formed below a position where the graphene is excited. The electrodes are formed as metal fingers (106) over a position of the graphene. USE - Electromagnetic device i.e. terahertz emission device. Uses include but are not limited to a laser, photoconductive switch, photonic mixer and photodetector, for medical imaging applications, security applications, communications applications, manufacturing applications and scientific spectroscopy applications. ADVANTAGE - The graphene has carrier mobility to be 10-100 times larger than low temperature gallium arsenide so as to provide higher photo-conductivity to the device. The graphene has photons with small energy for terahertz generation so as to reduce heat generation and enable high power terahertz generation using the graphene, thus preventing intrinsic problems for terahertz generation using the graphene due to unique electronic and photonic properties of the graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for fabricating an electromagnetic device. DESCRIPTION OF DRAWING(S) - The drawing shows a top view of a substrate with a graphene layer including an antenna metallization structure. Silicon carbide substrate (102) Graphene material (104) Metal fingers (106) Support structures (110) Spiral antenna structure (114)