• 专利标题:   Apparatus for producing graphene, comprises plasma arc generation unit to generate plasma arc on substrate surface, carbon source supply unit to supply carbon source and laser irradiation unit to irradiate laser and dissociate carbon atoms.
  • 专利号:   KR2014084477-A, KR1956135-B1
  • 发明人:   YEONG L M, LEE M Y
  • 专利权人:   RES INST IND SCI TECHNOLOGY, RES INST IND SCI TECHNOLOGY
  • 国际专利分类:   B01J019/08, B01J019/12, C01B031/02
  • 专利详细信息:   KR2014084477-A 07 Jul 2014 C01B-031/02 201452 Pages: 8
  • 申请详细信息:   KR2014084477-A KR153609 26 Dec 2012
  • 优先权号:   KR153609

▎ 摘  要

NOVELTY - Apparatus (100) comprises: a plasma arc generation unit (110) for generating plasma arc on a surface of a substrate (10); a carbon source supply unit (120) for supplying carbon source to the generated plasma on the substrate surface; and a laser irradiation unit (130) for irradiating the laser on the substrate surface for dissociating carbon atoms. USE - The apparatus is useful for producing graphene (claimed). ADVANTAGE - The apparatus allows for producing graphene easily and at desired position on the substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for producing graphene on a substrate using the apparatus, comprising selecting a position on the substrate where graphene is to be synthesized, generating plasma on the selected position of the substrate by supplying plasma using plasma arc generation unit, supplying carbon source, supplying carbon source on the substrate where plasma arc is generated, irradiating laser beam on the surface of the substrate where plasma arc is formed to dissociate carbon atoms and to form graphene on the substrate, and cooling the substrate. DESCRIPTION OF DRAWING(S) - The figure shows a schematic illustration of the apparatus for producing graphene. Substrate (10) Apparatus (100) Plasma arc generation unit (110) Carbon source supply unit (120) Laser irradiation unit (130)