• 专利标题:   Liquid chip for electron microscope, comprises respective upper surfaces of upper chip and lower chip arranged to face each other, and thin film layer transferred to cover hole portion, and made of conductive two-dimensional material.
  • 专利号:   US2021118643-A1, KR2021045782-A, KR2400448-B1, US11393655-B2
  • 发明人:   LEE J, KOO K, YUK J, YOOK J M, KOO K M, SANG L J
  • 专利权人:   KOREA ADVANCED SCI TECHNOLOGY INST, KOREA ADVANCED SCI TECHNOLOGY INST, KOREA ADVANCED INST SCI TECHNOLOGY
  • 国际专利分类:   H01J037/20, H01J037/26, H01J037/32, G01N023/2204
  • 专利详细信息:   US2021118643-A1 22 Apr 2021 H01J-037/20 202148 English
  • 申请详细信息:   US2021118643-A1 US990083 11 Aug 2020
  • 优先权号:   KR129230

▎ 摘  要

NOVELTY - Liquid chip 10 comprises upper chip, lower chip and waterway space portion formed by spacers spaced apart from each other located between upper chip and lower chip. The respective upper surfaces of upper chip and lower chip are arranged to face each other. The each of upper chip and lower chip comprises substrate 110 formed with cavity penetrating upper surface and lower surface. The support is set to comprise upper surface of substrate, and comprising hole portion formed with multiple holes in region where cavity of upper surface is located. The thin film layer 116 is transferred to cover hole portion, and made of conductive two-dimensional material. The each one end of first electrode 114 and second electrode 113 having constant electrical conductivity is set in vicinity of hole portion formed in upper chip or lower chip. The each of other ends of first and second electrode is set outside waterway space portion for electrical connection with external electrical supply source. USE - Liquid chip used for electron microscope. ADVANTAGE - The liquid chip has high mechanical characteristics and excellent bulging resistance property, and increases bulging resistance. DESCRIPTION OF DRAWING(S) - The drawing views exploded perspective view of liquid chip. Liquid chip (10) Substrate (110) Second electrode (113) First electrode (114) Thin film layer (116)