• 专利标题:   Reinforcement device for vertical probe card graphene electric double layer capacitor electrode, has needle electrode connected with high voltage positive power supply, and carbon source gas inlet connected with quartz tube.
  • 专利号:   CN203070938-U
  • 发明人:   BAO Z, CEN K, CHI Y, YAN J, WANG Z
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   H01G011/86, H01G013/00
  • 专利详细信息:   CN203070938-U 17 Jul 2013 H01G-013/00 201372 Pages: 8 Chinese
  • 申请详细信息:   CN203070938-U CN20619996 20 Nov 2012
  • 优先权号:   CN20619996

▎ 摘  要

NOVELTY - This utility model claims a kind of normal pressure a vertical probe card with a reinforcement device graphene electric double layer capacitor electrode. This utility model comprises a quartz tube, a heating furnace, a current collector, electrode, high voltage positive electric power source, an inert gas inlet, a hydrogen inlet, a bubbling and a carbon source gas inlet current collector and the needle electrode is arranged on the quartz tube, needle electrode connected with the high voltage positive power supply, needle point to the current collector electrode, collector grounded quartz tube is placed in the heating furnace of quartz tube end is open, and the other end is provided with an inert gas inlet, a hydrogen inlet and a carbon source gas inlet, a bubble in which a carbon source gas inlet is connected with the quartz tube. This utility model uses normal normal pressure glow discharge plasma enhanced chemical vapour deposition method to directly grow vertically oriented graphene nano sheet on the surface of the current collector without adhesive to directly obtain a vertically oriented graphene is a double layer electrode material of super capacitor active material.