• 专利标题:   Graphene resistor has graphene nano belt that is connected with the lower copper interconnection and upper copper interconnection, and is provided with patterns having snake shape structure.
  • 专利号:   CN102522384-A, CN102522384-B
  • 发明人:   KANG X, LI M, ZHAO Y
  • 专利权人:   SHANGHAI IC R D CENT CO LTD, SHANGHAI INTEGRATED CIRCUIT RES DEV CE
  • 国际专利分类:   H01L021/02, H01L023/522
  • 专利详细信息:   CN102522384-A 27 Jun 2012 H01L-023/522 201254 Chinese
  • 申请详细信息:   CN102522384-A CN10457614 30 Dec 2011
  • 优先权号:   CN10457614

▎ 摘  要

NOVELTY - The graphene resistor has a graphene nano belt that is connected with the lower copper interconnection and upper copper interconnection. The lower copper interconnection is provided with an interconnecting medium and metal copper. The graphene nano belt is provided with patterns having snake shape structure. The graphical overlay lower copper is interconnected with metal copper. The resistivity of the graphene nano belt is adjusted by doping or ion implantation. USE - Graphene resistor. ADVANTAGE - The high accuracy resistance integrated with active and passive component of chip can be realized. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the manufacturing method of graphene resistor. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart illustrating the manufacturing method of graphene resistor. (Drawing includes non English language text)