▎ 摘 要
NOVELTY - The graphene resistor has a graphene nano belt that is connected with the lower copper interconnection and upper copper interconnection. The lower copper interconnection is provided with an interconnecting medium and metal copper. The graphene nano belt is provided with patterns having snake shape structure. The graphical overlay lower copper is interconnected with metal copper. The resistivity of the graphene nano belt is adjusted by doping or ion implantation. USE - Graphene resistor. ADVANTAGE - The high accuracy resistance integrated with active and passive component of chip can be realized. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the manufacturing method of graphene resistor. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart illustrating the manufacturing method of graphene resistor. (Drawing includes non English language text)