• 专利标题:   Thin film-type piezoresistive vacuum meter for measuring vacuum or air pressure in scientific research and industrial production, has carrier connected with graphite pipe, and supporting wire connected with graphene sensing element.
  • 专利号:   CN104819804-A, CN104819804-B
  • 发明人:   ZHENG Q, YANG T, ZHU H, LI X
  • 专利权人:   UNIV TSINGHUA, UNIV TSINGHUA
  • 国际专利分类:   G01L021/00
  • 专利详细信息:   CN104819804-A 05 Aug 2015 G01L-021/00 201570 Pages: 9 Chinese
  • 申请详细信息:   CN104819804-A CN10259875 20 May 2015
  • 优先权号:   CN10259875

▎ 摘  要

NOVELTY - The meter has a graphene sensing element (2) comprising a flexible carrier (1). The flexible carrier is connected with a hollow graphite pipe. A supporting wire (3) is connected with the graphene sensing element. The holler graphite pipe is connected with the graphene sensing element along different direction. The supporting wire is connected with the hollow graphite pipe. The hollow graphite pipe is provided with an internal vacuum pipe. The flexible carrier is formed by dimethyl siloxane material. An interconnection portion (4) is fixed with the hollow graphite pipe. USE - Thin film-type piezoresistive vacuum meter for measuring vacuum or air pressure in scientific research and industrial production. ADVANTAGE - The meter is convenient to use and environment-friendly, and has high sensitivity, high stability and prolonged service life, and ensures electrification particle effect, and satisfies user requirements. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing thin film-type piezoresistive vacuum meter. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the thin film-type piezoresistive vacuum meter. Flexible carrier (1) Graphene sensing element (2) Supporting wire (3) Interconnection portion (4)