▎ 摘　　要

NOVELTY - Graphene epitaxial growth device comprises gas transportation system (1), epitaxial growth reaction chamber system (2), tail gas processing system (3), a safety support system (4), a cooling system (5). The automatic control system utilized for supplying source gas to epitaxial growth reaction chamber system through pipeline which is set with gas transport system. The safety control system and tail gas processing system is set with a cooling system. The automatic control system electrically set with tail gas processing system which is set with epitaxial growth reaction chamber system. USE - Used as graphene epitaxial growth device. ADVANTAGE - The graphene epitaxial growth device reduces mutual interference silicone carbide, and amorphous carbon reconstruction process in decomposition process, and reaction process is clear, and has clear mechanism. DETAILED DESCRIPTION - Graphene epitaxial growth device comprises a gas transportation system (1), a epitaxial growth reaction chamber system (2), a tail gas processing system (3), a safety support system (4), a cooling system (5). The automatic control system is utilized for supplying source gas to epitaxial growth reaction chamber system through pipeline which is set with gas transport system. The safety control system and tail gas processing system is set with a cooling system. The automatic control system is electrically set with tail gas processing system which is set with epitaxial growth reaction chamber system through pipeline. The cooling system is set with epitaxial growth reaction chamber system, a tail gas processing system through pipeline. The automatic control system is set with gas transportation system and epitaxial growth reaction chamber system further electrically set with source gas. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the graphene epitaxial growth device. Gas transportation system (1) Epitaxial growth reaction chamber system (2) Tail gas processing system (3) Safety support system (4) Cooling system (5)