• 专利标题:   Method for forming dual-gated graphene device, involves performing annealing process, after transferring graphene layer, and forming annealed graphene layer with secondary carrier mobility greater than transferred carrier mobility.
  • 专利号:   US2017154975-A1, CN106816411-A, TW201724378-A, US9941380-B2
  • 发明人:   LIU S, PAN S C, WU C, CHENG T, CHENG C, PAN Z, WU Z, PAN S Z
  • 专利权人:   TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, WU Z, UNIV TAIWAN NAT, TAIWAN SEMICONDUCTOR MFG CO LTD, UNIV TAIWAN NAT
  • 国际专利分类:   H01L021/02, H01L021/324, H01L029/66, H01L029/778, H01L021/336, H01L021/78, H01L029/16, H01L021/8256
  • 专利详细信息:   US2017154975-A1 01 Jun 2017 H01L-029/66 201738 Pages: 19 English
  • 申请详细信息:   US2017154975-A1 US954741 30 Nov 2015
  • 优先权号:   US954741

▎ 摘  要

NOVELTY - The method involves providing an insulating substrate (802) including an insulating layer. A hydrophobic layer (402) is formed over the insulating layer. A graphene layer (502) is transferred onto the hydrophobic layer. The transferred graphene layer is formed with the primary carrier mobility. An annealing process is performed, after transferring the graphene layer. The annealed graphene layer is formed with a secondary carrier mobility greater than the transferred carrier mobility. USE - Method for forming dual-gated graphene device such as graphene transistor. ADVANTAGE - The quality and/or performance of subsequently fabricated graphene-based devices are improved, and the carrier mobility is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the dual-gated graphene device. Hydrophobic layer (402) Graphene layer (502) Dielectric layer (702) Top-gated graphene device (800) Insulating substrate (802)