• 专利标题:   Liquid metal used in manufacture of acceleration sensor, comprises gallium-based liquid metal drop and graphene coated on gallium-based liquid metal drop.
  • 专利号:   CN115938637-A
  • 发明人:   YANG Z, CHEN J, ZHAO Z, CHEN P, ZHOU X
  • 专利权人:   UNIV CHONGQING
  • 国际专利分类:   G01P001/00, G01P015/12, H01B001/02, H01B001/04, H01B013/00
  • 专利详细信息:   CN115938637-A 07 Apr 2023 H01B-001/02 202341 Chinese
  • 申请详细信息:   CN115938637-A CN10010795 05 Jan 2023
  • 优先权号:   CN10010795

▎ 摘  要

NOVELTY - A liquid metal (5) comprises a gallium-based liquid metal drop and graphene coated on gallium-based liquid metal drop. USE - Liquid metal used in manufacture of acceleration sensor (all claimed) for monitoring blasting vibration acceleration of rock mass during excavation and blasting of tunnel and underground cavern in mining, large construction, flood control dam, oil exploration and civil engineering applications. ADVANTAGE - The liquid metal has non-toxicity, non-stickiness, corrosion resistance and high electronic conductivity, avoids potential safety hazards in use and manufacturing process, and forms stable electric contact with the metal electrode of the upper substrate in the moving process. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (i) manufacture of liquid metal; (ii) acceleration sensor, which comprises an upper substrate (1), a lower substrate (2) and the liquid metal. The lower substrate is provided with a diamond-shaped channel (4). The upper substrate is deposited and etched with a metal electrode (3) corresponding to the position above the diamond-shaped channel. The liquid metal is placed in the center of the diamond-shaped channel of the lower substrate as a movable component. The metal electrode surface of the upper substrate is bonded with the diamond-shaped channel surface of the lower substrate with an adhesive, and the liquid metal forms a stable electrical contact with the metal electrode of the upper substrate during the moving process; and (iii) manufacture of acceleration sensor, which involves manufacturing the upper substrate and the lower substrate according to the selected material and design size, using deep reactive ion etching to form diamond-shaped channel on the lower substrate, using sand blasting system to modify the diamond-shaped channel surface to form a zigzag micro-convex structure comprising a diamond-shaped channel side wall, carving the metal electrode on the upper plate with symmetrical n-shaped nickel-chromium conductive layer, using electron beam evaporator to deposit chromium layer on a glass substrate as an adhesion layer, depositing nickel layer on the chromium layer, using a photoresist as the etching mask, etching the nickel layer and the chromium layer by wet etchant to obtain a nickel-chromium alloy electrode, placing the liquid metal drops coated by the graphene in the center of the diamond-shaped channel, using a curing adhesive to bond the upper substrate and the lower substrate, testing the prepared acceleration sensor, and calibrating the acceleration value. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of acceleration sensor. 1Upper substrate 2Lower substrate 3Metal electrode 4Diamond-shaped channel 5Liquid metal