▎ 摘 要
NOVELTY - A carbon source-containing gas (24) is supplied to a metal catalytic layer (22) for graphene growth on a substrate and graphene (23) is formed at less than 500 degrees C by inductively coupled plasma-chemical vapor deposition. USE - Manufacture of graphene used for forming graphene sheet (claimed) for use in sensor and memory. ADVANTAGE - The graphene with large area is manufactured easily at low temperature. The graphene sheet has excellent transparency, flexibility and improved safety. The graphene can be transferred directly without requiring a separate process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for direct transfer method of graphene. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of the manufacture of graphene. Material (21) Metal catalytic layer (22) Graphene (23) Carbon source-containing gas (24)