▎ 摘　　要

NOVELTY - Sealing ring comprises perfluoroelastomer (FFKM) original glue, TR131 (Polyethylene) and filling material. The filling material is composed of carbon black, white carbon black and/or graphene oxide. USE - The sealing ring is useful for gas supply system at wafer processing device end. ADVANTAGE - The sealing ring has good physical and mechanical performance, excellent pressure change performance, excellent resistance to corrosion medium, strong oxidation and strong reducing medium, and high temperature resistance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparing the sealing ring, comprising: (i) mixing FFKM original glue, graphene oxide, white carbon black and carbon black, and cooling to obtain FFKM mixed rubber; (ii) extruding and pre-forming to obtain rubber rope; (iii) placing sealing ring mold in vulcanizing machine, preheating, placing cut rubber rope into mold, and pressurizing and vulcanizing to form; (iv) trimming formed sealing ring; and (v) heating and vulcanizing, and cooling.