• 专利标题:   Preparing flexible strain sensor useful e.g. in carbon dioxide sensor, comprises e.g. preparing thin film insulating layer on flexible substrate, performing annealing process, and forming multilayer graphene between flexible substrate and catalytic metal layer.
  • 专利号:   CN114045467-A
  • 发明人:   WANG X, YU G, WANG G, LUO G, LI J, LI X
  • 专利权人:   BEIJING GRAPHENE TECHNOLOGY RES INST CO
  • 国际专利分类:   C23C014/02, C23C014/04, C23C014/06, C23C014/08, C23C014/10, C23C014/20, C23C014/35, C23C014/58, G01B007/16
  • 专利详细信息:   CN114045467-A 15 Feb 2022 C23C-014/35 202223 Chinese
  • 申请详细信息:   CN114045467-A CN11322823 09 Nov 2021
  • 优先权号:   CN11322823

▎ 摘  要

NOVELTY - Preparing flexible strain sensor comprises (i) preparing a thin film insulating layer on a flexible substrate, (ii) forming a first carbon layer on one side of the thin film insulating layer, (iii) forming catalytic metal layer on the side of a catalytic copper layer away from the thin insulating layer, (iv) forming second carbon layer, and (v) performing an annealing process, forming multilayer graphene between the flexible substrate and catalytic layer, where the first carbon layer, catalyst metal layer and second carbon layers has the same shape and are laminated in sequence, and integrally forming the resistance gate and electrode connection structure between the two carbon layers. USE - The flexible strain sensor e.g. graphene metal film sensor is useful in carbon dioxide sensor, carbon monoxide sensor and carbon dioxide detector. ADVANTAGE - The method avoids photo-etching, laser sintering, corrosive solution and reducing reagent material that causes damage and pollution to the graphene, ensures that graphene has good radiating performance, so that multilayer graphene flexible substrate surface improves heat dissipation of the flexible device, reduces resistance temperature drift coefficient of the metal film to reduce the measuring error, improves measuring precision, and realizes large-scale production of the strain sensor in simple manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for flexible strain sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart illustrating the method for preparing flexible strain sensor (Drawing includes non-English language text).