• 专利标题:   Dielectric barrier discharge graphene preparation device comprises gas supply system, power supply system, detection and analysis system, plasma processing chamber comprising upper electrode, quartz medium, mica sheet and lower electrode.
  • 专利号:   CN111484003-A
  • 发明人:   ZHANG B, JIN X, YU W, MA W, GAO Z
  • 专利权人:   CHANGZHOU VOCATIONAL MECHATRONIC TECHNOL
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN111484003-A 04 Aug 2020 C01B-032/186 202068 Pages: 7 Chinese
  • 申请详细信息:   CN111484003-A CN10245255 31 Mar 2020
  • 优先权号:   CN10245255

▎ 摘  要

NOVELTY - Dielectric barrier discharge graphene preparation device comprises a plasma processing chamber (1), a gas supply system (3), a power supply system (13) and a detection and analysis system, where the plasma processing chamber adopts a structure of horizontal flat panel capacitor combined with dielectric barrier discharge. The plasma processing chamber comprises an upper electrode (4), a quartz medium (5), a mica sheet (9) and a lower electrode (11). The upper and lower electrodes are respectively connected to two ends of the power supply system. A discharge area (7) is formed between the upper electrode and the lower electrode. A palladium film (6) is deposited on the surface of the quartz medium. The quartz medium is connected to the upper electrode. A monomolecular carbon film (8) is deposited on one side of the mica sheet, and a gold film (10) is deposited on the other side. An electromagnetic element (2) is provided outside the upper electrode and the lower electrode. USE - Dielectric barrier discharge graphene preparation device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing the dielectric barrier discharge graphene preparation device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the dielectric barrier discharge graphene preparation device. Plasma processing chamber (1) Electromagnetic element (2) Gas supply system (3) Upper electrode (4) Quartz medium (5) Palladium film (6) Discharge area (7) Monomolecular carbon film (8) Mica sheet (9) Gold film (10) Lower electrode (11) Power supply system (13)