• 专利标题:   Preparing flexible graphene FET (field-effect transistor) involves coating layer of thin film on silicon substrate, forming alumina dielectric layer on thin film to obtain substrate, transferring graphene layer on substrate by stamp method, peeling off graphene device from substrate silicon.
  • 专利号:   CN115083917-A
  • 发明人:   SONG Q, TIAN J, WANG C, SUN H, ZHANG W, HU B, JIA Y
  • 专利权人:   UNIV SHENZHEN TECHNOLOGY
  • 国际专利分类:   H01L021/336, H01L029/16, H01L029/51, H01L029/786
  • 专利详细信息:   CN115083917-A 20 Sep 2022 H01L-021/336 202200 Chinese
  • 申请详细信息:   CN115083917-A CN10599074 30 May 2022
  • 优先权号:   CN10599074

▎ 摘  要

NOVELTY - Preparing flexible graphene field-effect transistor involves coating a layer of thin film on the silicon substrate, and forming an alumina dielectric layer on the thin film to obtain the substrate. A first electrode is prepared on the alumina dielectric layer. A gate dielectric layer is formed on the substrate, the gate dielectric layer covers the first electrode, and the second electrode is processed on the gate dielectric layer, the first electrode and the second electrode are not connected. The graphene layer is transferred on the substrate by stamp method, and the graphene is patterned, and the second electrode is exposed, the graphene is used for connecting the first electrode and the second electrode to obtain the graphene device. The graphene device is peeled off from the substrate silicon, to obtain the graphene field field-effect transistor flexible substrate. USE - Method for preparing the flexible graphene FET. ADVANTAGE - The preparation method of flexible graphene field field-effect transistor improves the density of the transistor under the unit thickness. The method is simple and cost-effective.