• 专利标题:   Removing polymethylmethacrylate (PMMA) from graphene surface by subjecting PMMA layer to deep UV light irradiation, treating irradiated PMMA layer to remove PMMA layer and drying cleaned layer located on substrate in stream of nitrogen gas.
  • 专利号:   EP3936476-A1, EP3936476-B1
  • 发明人:   ALEXEEVA N, KASALYNAS I
  • 专利权人:   VALSTYBINIS MOKSLINIU TYRIMU INSTITUTAS
  • 国际专利分类:   C01B032/194, H01L021/027, B82Y030/00, C23C016/26, C23C016/56, G03F007/32, G03F007/42
  • 专利详细信息:   EP3936476-A1 12 Jan 2022 C01B-032/194 202211 Pages: 10 English
  • 申请详细信息:   EP3936476-A1 EP169747 21 Apr 2021
  • 优先权号:   LT000535

▎ 摘  要

NOVELTY - Removing a polymethylmethacrylate (PMMA) from a graphene surface, where PMMA layer covers a graphene layer located on a substrate, comprises: subjecting the PMMA layer to a deep UV light irradiation, to facilitate the removal of PMMA layer from the graphene surface; treating an irradiated PMMA layer in order to remove PMMA layer from the graphene surface; and drying a cleaned graphene layer located on a substrate in a stream of nitrogen gas. The irradiation is performed by a photo-exposure of the PMMA layer with the UV-C band source. The treatment is performed by a development of photoexposed PMMA layer in an alcohol/deionized water mixture. USE - The method is useful for removing a polymethylmethacrylate from a graphene surface. ADVANTAGE - The method: provides effective, reliable, accessible and easy to use polymethylmethacrylate removal method for cleaning graphene without changing its properties; improves the cleaning efficiency; does not impact the properties of cleaned graphene; does not use hazard chemicals (i.e. toxic or carcinogenic); requires no additional washing after development; utilizes low-pressure mercury vapor lamp that is inexpensive and easy to use and maintain; and utilizes alcohol/water mixture which exhibits excellent properties as a developer with enhanced dissolution rate, thus avoiding residuals introduction on a surface of graphene. DETAILED DESCRIPTION - INORGANIC CHEMISTRY - Preferred Method: In the method: whole area of the PMMA layer is photoexposed for 2-6 hours, depending on the layer thickness, with the low-pressure mercury vapor lamp with the emission spectrum of 100-280 nm, with a peak at less than or equal to of 253.7 nm; the photoexposed PMMA layer is developed in the alcohol/water mixture comprising methanol/water, ethanol/water or isopropanol/water; and the photoexposed PMMA layer is developed in isopropanol/water mixture having an isopropanol/water volume ratio of 70:30 to 75:25.