• 专利标题:   Meta material infrared spectrum based nanometer displacement sensor, has displacement input module for driving graphene sensing layer, and infrared spectrum device fixed with outer side of direction and distance observation sensor main body.
  • 专利号:   CN105547158-A, CN105547158-B
  • 发明人:   CAI G, CHEN Y, LIU H, LIU Q, YAO J, YE L
  • 专利权人:   UNIV XIAMEN
  • 国际专利分类:   G01B011/02
  • 专利详细信息:   CN105547158-A 04 May 2016 G01B-011/02 201637 Pages: 6 English
  • 申请详细信息:   CN105547158-A CN10887387 04 Dec 2015
  • 优先权号:   CN10887387

▎ 摘  要

NOVELTY - The sensor has a displacement input module provided with Meta material sensing module that is provided with a correcting graphene sheet, a supporting substrate layer, a circle array, a middle dielectric layer and a graphene sensing layer. Measuring object is fixed on an upper part of the displacement input module. The displacement input module drives the graphene sensing layer and changes thickness of the middle dielectric layer. An infrared spectrum device is fixed with an outer side of a moving direction and distance observation sensor main body. USE - Meta material infrared spectrum based nanometer displacement sensor. DESCRIPTION OF DRAWING(S) - The drawing shows an exploded perspective view of a Meta material infrared spectrum based nanometer displacement sensor.