• 专利标题:   Method for producing graphene well on graphene sheet, involves depositing first metal layer on top of graphene sheet, depositing passivation layer on top of first metal layer, and depositing photoresist layer on top of passivation layer.
  • 专利号:   US2017365474-A1, WO2017218792-A1, CN109314043-A, KR2019019146-A, EP3472855-A1
  • 发明人:   PAN D, GOLDSMITH B, LERNER M
  • 专利权人:   NANOMEDICAL DIAGNOSTICS INC, NANOMEDICAL DIAGNOSTICS INC, NANOMEDICAL DIAGNOSTICS INC
  • 国际专利分类:   H01L021/04, H01L029/16, B82Y030/00, B82Y040/00, H01L021/02, G01N027/30, H01L021/027, H01L021/311, H01L021/324
  • 专利详细信息:   US2017365474-A1 21 Dec 2017 H01L-021/04 201802 Pages: 9 English
  • 申请详细信息:   US2017365474-A1 US623232 14 Jun 2017
  • 优先权号:   US350634P, US623232, CN80037184

▎ 摘  要

NOVELTY - The method involves placing a graphene sheet (115) on a substrate. First metal layer is mounted on top of the graphene sheet. A passivation layer is mounted on a top of the first metal layer. A photoresist layer is mounted on top of the passivation layer. Second metal layer is mounted between the first metal layer and the passivation layer, where the passivation layer comprises a dielectric layer. The photoresist layer is etched to expose a surface of the passivation layer. The passivation layer is removed by a dry etching mechanism. USE - Method for producing a graphene well on a graphene sheet. ADVANTAGE - The method enables applying gold coating to protect graphene from being potentially contaminated during wire bonding, encapsulation, wafer dicing and cleaning as the graphene sheet is prepared for installation within a sensor or device. The method enables allowing the passivation layer to effectively reduce reverse-current leakage, increase breakdown voltage and raise power dissipation rating, so that the passivation layer is mounted over metal connections on a graphene wafer to prevent electrical currents from leaking and damaging the graphene based devices. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a graphene sheet applied with a metal coating. Wafer (105) Platinum (110) Graphene sheet (115) Metal coating (120)